The phoenix nanome|x is an ultra high-resolution nanofocus X-ray inspection system designed for inspecting high-quality assemblies and interconnections in the semiconductor and SMT industries. The system offers excellent performance and versatility and can be optionally used for 2D X-ray inspection as well as for full 3D computed tomography (micro- and nanoCT as well as planarCT). With the phoenix x|act software package the phoenix nanome|x is the system of choice to ensure meeting actual and future zero defect requirements.
Features and Benefits
Customer Benefits:
- Combined 2D / 3D CT operation
- Superior dual detector technology (digital image chain and active temperature-stabilized digital detector with 30 fps) for brilliant live images
- Automation of inspection steps possible
- Outstanding ease-of-use
Key Features:
- High magnification
- Precise Manipulation
- High repeatability
- 180 kV / 15 W high-power open nanofocus tube with up to 200 nanometer detail detectability
- Upgradeable to nanoCT® and / or planarCT
- Optional:
- phoenix x|act software package for easy and fast CAD based high-resolution automated X-ray inspection (μAXI) for extremely high defect coverage with high magnification and repeatability
- Brilliant live inspection images due to high dynamic temperature-stabilized digital GE DXR detector with 30 fps (frames per second) and active cooling
- 3D computed tomography scans within 10 seconds
- Up to 2 times faster data acquisition at the same high image quality level by diamond|window
– See more at: www.gemeasurement.com